Fujita, H.  <br/><br/>
Micromachines as tools for nanotechnology 

 - New Delhi  Springer  2004 
 - xii, 212p.  
<br/><br/><label>ISBN: </label>81-8128-202-7 
<br/><br/><label>Subjects--Index Terms: </label>Microtechnology  MEMS  Nanotechnology 
<br/><br/><label>Universal Decimal Class. No.: </label>608.001.76  / FUJ