TY  - BOOK
AU  - Mahalik, N.P.[ed.]
TI  - Micromanufacturing and nanotechnology
SN  - 3-540-25377-7
PY  - 2006///
CY  - Germany
PB  - Springer- Verlag
KW  - Nanotechnology
KW  - Micro manufacturing
KW  - Microelectromechanical system (MEMS)
KW  - Micro-opto-electro-mechanical system (MOEMS)
KW  - (MEMS)
KW  - (MOEMS)
ER  -