Schellenberg, F.M. [ed.] <br/><br/>
Selected papers on resolution enhancement techniques in optical lithography-Bellingham  

 - Washington   SPIE Press   2004 
 - xx, 875p.  
 - (SPIE milestone series v.178) .
<br/><br/><label>ISBN: </label>0-8194-5166-5 
<br/><br/><label>Subjects--Index Terms: </label>Integrated circuits-design and construction  Microlithography  Photolithography  semiconductors-Etching  Optical lithography 
<br/><br/><label>Universal Decimal Class. No.: </label>621.3.049.77  / SCH