Trimmer,William <br/><br/>
Micromechanics & MENS; classic & Seminal Papers to 1990 

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 - New York  Institute of Electrical & Electronics Engineers  1997 
 - xv,701p   
<br/><br/>  "A Selected Reprint volume" 
<br/><br/><label>ISBN: </label>0-7803-1085-3 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics  Electronics  Semiconductors  Electromechanical devices  MICROMECHANICAL  DEVICES  Actuators 
<br/><br/><label>Dewey Class. No.: </label>621.3.049.77