Hsu, Tai-Ran <br/><br/>
MEMS and microsystems  Design and manufacture 

 - New Delhi  Tata Mc Graw Hill  2002 
 - 436p. 
<br/><br/><label>ISBN: </label>0-07-239391-2 
<br/><br/><label>Subjects--Topical Terms: </label><br/>621.38.049.77--Microelectronics--Microsystems design, packaging
<br/><br/><label>Universal Decimal Class. No.: </label>621.38.049.77  / HSU