Ghandhi, Sorab K. <br/><br/>
VLSI Fabrication principles/ 2nd ed.  Silicon and gallium arsenide 

 - 2nd ed. 
 - New York  John Wiley  2004 
 - XXIV, 834p. 
<br/><br/><label>ISBN: </label>9814126942 
<br/><br/><label>Subjects--Index Terms: </label>621.38  fabrication principles 
<br/><br/><label>Dewey Class. No.: </label>621.38049.77  / GHA