TY  - GEN
AU  - Ghandhi, Sorab K.
TI  - VLSI Fabrication principles/ 2nd ed: Silicon and gallium arsenide
SN  - 9814126942
U1  - 621.38049.77 
PY  - 2004///
CY  - New York
PB  - John Wiley
KW  - 621.38
KW  - fabrication principles
ER  -