Gandhi, Sorab K <br/><br/>
VLSI fabrication principles  silicon and arsenide 

 - 2nd ed. 
 - New York  John Wiley  1994 
 - xxiv, 834p. 
<br/><br/><label>ISBN: </label>00471580058 
<br/><br/><label>Subjects--Topical Terms: </label><br/>621.381.94:6--Integrated circuits - very large scale integration--Silicon--Gallium arsenide
<br/><br/><label>Universal Decimal Class. No.: </label>621.381  / GHA