TY  - GEN
AU  - Gandhi, Sorab K
TI  - VLSI fabrication principles: silicon and arsenide
SN  - 00471580058
PY  - 1994///
CY  - New York
PB  - John Wiley
KW  - 621.381.94:6
KW  - Integrated circuits - very large scale integration
KW  - Silicon
KW  - Gallium arsenide
ER  -