May, Gary S <br/><br/>
Fundamentals of semiconductor fabrication 

 - Singapore  John Wiley  2004 
<br/><br/><label>ISBN: </label>981253072x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>621.382--Semiconductor fabrication
<br/><br/><label>Universal Decimal Class. No.: </label>621.382  / MAY