Gad-el-Hak, Muhamed [ed.] <br/><br/>
MEMS:  introduction and fundamentals 

 - 2nd ed.  
 - Boca Raton  CRC Taylor & Francis  2006 
 - various pagination  3v. 
 - (Mechanical Engineering)  .
<br/><br/> V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications 
<br/><br/><label>ISBN: </label>0-8493-9137-7 
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics  Nanotechnology  Microelectromechanical systmes  MEMs-fundamentals 
<br/><br/><label>Universal Decimal Class. No.: </label>621(035)  / GAD.1