TY  - BOOK
AU  - Zetterling, Carl-Mikael
AU  - 
TI  - Process technology for silicon carbide devices
SN  - 0-85296-998-8
U1  - 621.3:661.665.1 
PY  - 2003///
CY  - London
PB  - INSPEC/IEE
KW  - Silicon carbide - Electric properties
ER  -