Hsu, Tai-Ran <br/><br/>
MEMS and microsystems: design and manufacture 

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 - New Delhi  Tata McGraw- Hill  2005 
 - xii,436p.   
<br/><br/>   
<br/><br/><label>ISBN: </label>0-07-048709-x 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics  Electronics  Semiconductors  Microelectromechanical systems  MEMS  Microelectronic packaging 
<br/><br/><label>Dewey Class. No.: </label>621.38