Pelesko, John A. <br/><br/>
Modeling MEMS and NEMS 

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 - Boca Raton  Chapman & Hall /CRC  2007 
 - xxiii, 357p   
<br/><br/>   
<br/><br/><label>ISBN: </label>1584883065 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>MEMS- Mathematical models  NEMS- Mathematical models  Microelectromechanical systems  Nanoelectromechanical systems 
<br/><br/><label>Dewey Class. No.: </label>681.382