TY  - BOOK
AU  - Pelesko, John A.
AU  - Bernstein, David H.
TI  - Modeling MEMS and NEMS
SN  - 1584883065
U1  - 681.382 
PY  - 2007///
CY  - Boca Raton
PB  - Chapman & Hall /CRC
KW  - MEMS- Mathematical models
KW  - NEMS- Mathematical models
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
ER  -