Jackson, Mark J. <br/><br/>
Microfabrication and nanomanufacturing 

 - Boca Raton  CRC Press  2006 
 - 401p. 
<br/><br/><label>ISBN: </label>0-8247-2431-3 
<br/><br/><label>Subjects--Index Terms: </label>Nanotechnology  Nanomanufacturing 
<br/><br/><label>Universal Decimal Class. No.: </label>621.7/.9  / JAC