TY  - BOOK
AU  - Ukita, H.
AU  - 
TI  - Micromechanical photonics
SN  - 9783540313335
U1  - 535.12:621 
PY  - 2006///
CY  - Berlin
PB  - Springer - Verlag
KW  - MEMS
KW  - Optical Tweezers
KW  - Optical Rotor
ER  -