TY  - BOOK
AU  - Frangi, Attilio
AU  - 
TI  - Advances in multiphysics simulation and experimental testing of Mems
SN  - 9781860948626
U1  - 621.382 
PY  - 2008///
CY  - London
PB  - Imperial College Press
KW  - Microelectromechanical systems - simulations methods
KW  - Microelectromechanical systems - Testing
KW  - MEMS
ER  -