Tseng, Ampere A. <br/><br/>
Nanofabrication: fundamentals and applications 

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 - Singapore  World Scientific Publishing  2008 
 - viii, 574p   
<br/><br/>   
<br/><br/><label>ISBN: </label>9789812700766 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Nano technology  Nano fabrication  Nano scale structures  Nano devices  Fabrication - Nano technology 
<br/><br/><label>Dewey Class. No.: </label>620.3