TY - BOOK AU - Fleetwood, Daniel M. AU - Pantelides,Sokrates T. TI - Defects in microelectronic materials and devices SN - 9781420043761 U1 - 621.3.049.77 PY - 2009/// CY - London PB - CRC KW - Microelectronics-materials-testing KW - Metal oxide semiconductor field effect transistors-testing KW - Integrated circuits-defects ER -