Reinhardt, Karen. A. <br/><br/>
Handbook of silicon wafer cleaning technology 

 - 2nd 
 - Norwich  William Andrew  2008 
 - xxvi, 718p   
<br/><br/>   
<br/><br/><label>ISBN: </label>9780815515548 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Silcon-on-insulator technology  Silicon wafer  Dry cleaning  Wet chemical processes  Plasma stripping 
<br/><br/><label>Dewey Class. No.: </label>621.315.617