Ostrikov, Kostya(Ken) Plasma-Aided nanofabrication:from plasma sources to nanoassembly - - Weinhein Wiley - VCH 2007. - xiii,300p. ISBN: 9783527406333 ISSN: Subjects--Index Terms: Nanostructured materials Plasma engineering Low temparature plasmas Manufactureing processes Dewey Class. No.: 620.1.03