Baglio, Salvatore <br/><br/>
Scaling issues and design  of MEMS 

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 - Chichester  John Wiley and Sons  2007 
 - xiii,229p.   
<br/><br/>   
<br/><br/><label>ISBN: </label>9780470016992 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical  systems - design and construction  MEMS 
<br/><br/><label>Dewey Class. No.: </label>621.382