Saile,Volker ...[et.al] <br/><br/>
LIGA and its applications 

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 - Weinheim  Wiley-VCH  2009 
 - x,479p.   
<br/><br/>   
<br/><br/><label>ISBN: </label>9783527316984 
<br/><br/><label>ISSN: </label>
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems  Microtechnology 
<br/><br/><label>Dewey Class. No.: </label>621.382