TY  - BOOK
AU  - Saile,Volker ...[et.al]
AU  - 
TI  - LIGA and its applications
SN  - 9783527316984
U1  - 621.382 
PY  - 2009///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Microtechnology
ER  -