Ghandhi, Sorab K <br/><br/>
VLSI fabrication principles: silicon and gallium arsenide 

 - 2nd ed 
 - New York  John Wiley  1994 
 - xxiv, 834p.   
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<br/><br/><label>ISBN: </label>
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<br/><br/><label>Subjects--Index Terms: </label>silicon arsenide  gallium arsenide 
<br/><br/><label>Dewey Class. No.: </label>621.315.59