TY  - BOOK
AU  - Ghandhi, Sorab K
AU  - 
TI  - VLSI fabrication principles: silicon and gallium arsenide
U1  - 621.315.59 
PY  - 1994///
CY  - New York
PB  - John Wiley
KW  - silicon arsenide
KW  - gallium arsenide
ER  -