Stuart , R. V <br/><br/>
Vacuum Technology , Thin Films , and Sputtering , an Introduction 

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 - New York  Academic Press  1983 
 - viii, 151 p.   
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<br/><br/><label>Subjects--Index Terms: </label>Thin films ,Vacuum Technology  Sputterng , Thin Films-Vacuum Technology 
<br/><br/><label>Dewey Class. No.: </label>621.52