Madou, Marc J <br/><br/>
Fundamentals of microfabrication and nanotechnology 

 - 3rd ed. 
 - Boca Raton  CRC Press  2012 
 - 3v. 
<br/><br/> V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology  V2.Manufacturing techniques for microfabrication and nano technology  V3. From Mems to <br/>Bio-MEMS and Bio-NEMS 
<br/><br/><label>ISBN: </label>978142005545 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems Nano electromechanical systems Microfluidics Solidstate physics 
<br/><br/><label>Universal Decimal Class. No.: </label>621.382:620.3  / MAD.1-.3  R