Dorey, Robert <br/><br/>
Ceramic thick films for MEMS and microdevices 

 - Amsterdam  Elsevier  2012 
 - 191p. 
<br/><br/><label>ISBN: </label>9781437778175 
<br/><br/><label>Subjects--Index Terms: </label>Piezoelectric devices Ceramic thick films 
<br/><br/><label>Universal Decimal Class. No.: </label>621.315.612  / DOR