Ananthasuresh, G K ...[et.al] <br/><br/>
Micro and smart systems 
G. K. Amamthasuresh...[et.al] 
 - New Delhi  Wiley India  2010 
 - xxvii, 390p. 
<br/><br/><label>ISBN: </label>9788126527151 
<br/><br/><label>Subjects--Index Terms: </label>Micro systems - Sensors Microfabrication Micromachining technologies Finite element method 
<br/><br/><label>Universal Decimal Class. No.: </label>681.586  / ANA