Lee, Ki Bang  <br/><br/>
Principles of microelectromechanical systems 

 - New Jersey  John Wiley  2011 
 - xii, 667p. 
<br/><br/><label>ISBN: </label>9780470466346 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems Electrostatic actuators Electromagnetic actuators 
<br/><br/><label>Universal Decimal Class. No.: </label>621.38:621.319  / LEE