Makabe, Toshiaki <br/><br/>
Plasma electronics  applications in microelectronic device fabrication 
Toshiaki Makabe and Zoran Lj Petrovic 
 - 2nd ed. 
 - New York  CRC Press  2015 
 - xxxv, 376p. 
<br/><br/><label>ISBN: </label>9781482222050 
<br/><br/><label>Subjects--Index Terms: </label>Plasma engineering Low temperature plasma Plasma processing 
<br/><br/><label>Universal Decimal Class. No.: </label>533.922  / MAK