Brand, Oliver <br/><br/>
CMOS-MEMS 
Oliver Brand and Gary K. Fedder 
 - Germany  Wiley-VCH Verlag  2013 
 - xiv, 594p. 
 - Advanced micro and nanosystems .
<br/><br/><label>ISBN: </label>9783527334995 
<br/><br/><label>Subjects--Index Terms: </label>Integrated circuits design CMOS-MEMS-Biological and chemical application Microelectromechanical systems CMOS based sensors 
<br/><br/><label>Universal Decimal Class. No.: </label>621.3.049.77  / BRA