Vinoy, K.J....[et.al.] <br/><br/>
Micro and smart devices and systems 
by K.J. Vinoy......[et.al.] 
 - New Delhi  Springer  2014 
 - xxvi, 508p. 
 - Springer tracts in mechanical engineering .
<br/><br/><label>ISBN: </label>9788132219125 
<br/><br/><label>Subjects--Index Terms: </label>Microsensors Microactuators Microelectronics  MEMS 
<br/><br/><label>Universal Decimal Class. No.: </label>621.382  / VIN