Chapman, Brain <br/><br/>
Glow discharge processes: sputtering and plasema etching 

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 - New York  John Wiley  1980 
 - xv, 406 p.   
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<br/><br/><label>Subjects--Index Terms: </label>Electricity  Physics  Optics  Biophysics  Astrophysics  Nuclear physics  Radioactivity  Quantum theory  Mechanics  Hydrostatics  Thermodynamics  Science  Chemistry  Electronics  Amplifiers- electronics  Cybernetics  digital electronics  Electric conductors  Electronic circuits  Semiconductors  Superconductors  Transistors  Microelectronics  Semiconductor  Engineering  Technology  electricity and electronics 
<br/><br/><label>Dewey Class. No.: </label>537.525