TY  - BOOK
AU  - Chapman, Brain
AU  - 
TI  - Glow discharge processes: sputtering and plasema etching
U1  - 537.525 
PY  - 1980///
CY  - New York
PB  - John Wiley
KW  - Electricity
KW  - Physics
KW  - Optics
KW  - Biophysics
KW  - Astrophysics
KW  - Nuclear physics
KW  - Radioactivity
KW  - Quantum theory
KW  - Mechanics
KW  - Hydrostatics
KW  - Thermodynamics
KW  - Science
KW  - Chemistry
KW  - Electronics
KW  - Amplifiers- electronics
KW  - Cybernetics
KW  - digital electronics
KW  - Electric conductors
KW  - Electronic circuits
KW  - Semiconductors
KW  - Superconductors
KW  - Transistors
KW  - Microelectronics
KW  - Semiconductor
KW  - Engineering
KW  - Technology
KW  - electricity and electronics
ER  -