TY  - BOOK
AU  - Dearnaley, G
AU  - 
TI  - Ion implantation
U1  - 539.3 
PY  - 1975///
CY  - Amsterdam
PB  - North Holland
KW  - Solids
KW  - ion
KW  - Ion implantation
KW  - chystalline solids
ER  -