TY  - BOOK
AU  - Bucknall,David,G
AU  - Bucknall,David G.
TI  - Nanolithography and patterning techniques in microelectronics: Project Report
SN  - 1855739313 (Woodhead)
U1  - 621.3815/31 
PY  - 2005///
CY  - Cambridge, Boca Raton, FL
PB  - Woodhead Pub., CRC Press
KW  - Nanolithography
UR  - http://www.loc.gov/catdir/toc/fy0607/2006365086.html
UR  - http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
ER  -