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003 ViArRB
005 20151026130753.0
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a
022 _a
040 _aAdlib
082 _a541.12.034.6
245 _aChemical vapour deposition [proceedings]
250 _a
260 _aPanington
_bThe Electrochemical Society
_c1987
300 _axv, 1269p.
_c
500 _a Conference: International conference on chemical vapour deposition: 10th: 1987: Panington
100 _aCullan, G W
_ed. by
700 _a
_a
942 _cBK
653 _aChemical vapour deposition
999 _c12761
_d12761