| 000 | 00665cam a2200181 a 4500 | ||
|---|---|---|---|
| 005 | 20160318124820.0 | ||
| 008 | 870723s1987 wb a b 001 0 eng | ||
| 082 | 0 | 0 |
_a621.36/6 _bBOY |
| 100 | 1 |
_aBoyd, Ian W., _93078 |
|
| 245 | 1 | 0 |
_aLaser processing of thin films and microstructures : _boxidation, deposition, and etching of insulators / _cIan W. Boyd. |
| 300 |
_aviii, 320 p. : _b77 ill. ; _c24 cm. |
||
| 490 | 1 |
_aSpringer series in materials science ; _v3 |
|
| 653 | _aLasers--Industrial applications | ||
| 942 | _cBK | ||
| 260 |
_aBerlin ; _bSpringer-Verlag, _cc1987. |
||
| 020 | _a0387179518 | ||
| 830 | 0 |
_aSpringer series in materials science ; _vv. 3. _93077 |
|
| 999 |
_c147436 _d147436 |
||