| 000 | 00754cam a2200181 4500 | ||
|---|---|---|---|
| 005 | 20160318124854.0 | ||
| 008 | 710513m19711972nyua b 000 0 eng | ||
| 082 | 0 | 0 |
_a621.381/7 _bMIL |
| 100 | 1 |
_aMilek, John T. _94594 |
|
| 245 | 1 | 0 |
_aSilicon nitride for microelectronic applications, _c[by] John T. Milek. _b6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. |
| 300 |
_a6 v. _billus. _c28 cm. |
||
| 490 | 1 | _aHandbook of electronic materials, v. 3, 6 | |
| 653 |
_aMicroelectronics--Materials. _aSilicon nitride |
||
| 942 | _cBK | ||
| 260 |
_aNew York, _bIFI/Plenum, _c1971-72. |
||
| 020 | _a0306671034 | ||
| 830 | 0 |
_aHandbook of electronic materials ; _vv. 3, etc. _94593 |
|
| 999 |
_c148460 _d148460 |
||