| 000 | 00617cam a2200169 a 4500 | ||
|---|---|---|---|
| 005 | 20160318124919.0 | ||
| 008 | 970128s1997 nyua b 001 0 eng | ||
| 082 | 0 | 0 |
_a621.3815/2 _bLEV |
| 245 | 0 | 0 |
_aSemiconductor technology : _bprocessing and novel fabrication techniques / _cedited by Mikhail Levinshtein, Michael S. Shur. |
| 300 |
_axviii, 240 p. : _bill. ; _c24 cm. |
||
| 653 |
_aSemiconductors _aSemiconductor doping _aSemiconductors--Defects |
||
| 700 | 1 |
_aLevinshteĭn, M. E.,ed. _95724 |
|
| 700 | 1 |
_aShur, Michael., ed. _95725 |
|
| 942 | _cBK | ||
| 260 |
_aNew York : _bWiley, _cc1997. |
||
| 020 | _a0471127922 | ||
| 999 |
_c149322 _d149322 |
||