000 00563cam a22001451 4500
005 20160318124947.0
008 730307m19649999enka b 000 0 eng
082 _a621.55
_bBEC
100 1 _aBeck, A. H. W.
_eed.
_97457
245 1 0 _aHandbook of vacuum physics,
_cEdited by A. H. Beck.
_b3v., v. 1. Gases and vacua. (pts. 1-6 in 2 v.)--v. 2. Physical electronics (pts. 1-3 in 2 v.)-- v. 3. Technology. (pts. 1-4 in 2 v.)
300 _a v.
_billus.
_c22 cm.
653 _aVacuum technology
942 _cBK
260 _aOxford,
_aNew York,
_bPergamon Press;
_c1964-
999 _c150140
_d150140