| 000 | 00646cam a22001814a 4500 | ||
|---|---|---|---|
| 005 | 20160318125138.0 | ||
| 008 | 050601s2005 ne a b 001 0 eng | ||
| 082 | 0 | 0 |
_a537.5 _bSAN |
| 100 | 1 |
_aSantos, Hector J. de los. _98370 |
|
| 245 | 1 | 0 |
_aPrinciples and applications of NanoMEMS physics / _cby Héctor J. De Los Santos. |
| 300 |
_axv, 254 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aMicrosystems ; _v15 |
|
| 653 |
_aQuantum electronics _aWave-particle duality _aNanotechnology _aMicroelectromechanical systems |
||
| 942 | _cBK | ||
| 260 |
_aNew Delhi: _bSpringer, _cc2005. |
||
| 020 | _a1402032382 | ||
| 830 | 0 |
_aMicrosystems (Series) ; _vv. 15. _98369 |
|
| 999 |
_c150724 _d150724 |
||