| 000 | 00519cam a22001574a 4500 | ||
|---|---|---|---|
| 005 | 20160318125140.0 | ||
| 008 | 000725s2000 waua b 001 0 eng | ||
| 082 | 0 | 0 |
_a621.381 _bMEM |
| 245 | 0 | 0 |
_aMEMS and MOEMS technology and applications / _cP. Rai-Choudhury, editor. |
| 300 |
_axi, 520 p. : _bill. ; _c27 cm. |
||
| 653 |
_aMicroelectromechanical systems. _aOptoelectronic devices. |
||
| 700 | 1 |
_aRai-Choudhury, P., ed. _98573 |
|
| 942 | _cBK | ||
| 260 |
_aNew Delhi : _bPHY Learning, _cc2009. |
||
| 020 | _a0819437166 | ||
| 999 |
_c150783 _d150783 |
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