| 000 | 00728nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20160826100741.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0-521-32254-5 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a535.374 | ||
| 245 | _a Laser chemical processing for microelectronics | ||
| 250 | _a | ||
| 260 |
_aCambridge, _bCambridge University Press, _c1989 |
||
| 300 |
_a172 p., _b, _cBook |
||
| 500 | _aInternational School of Photonics | ||
| 653 | _aLasers- industrial applicationsLasers- industrial applicationsIntegrated circuits-design and construction | ||
| 100 | _aIbbs, K. G. | ||
| 700 |
_aOsgood, R. M _a |
||
| 942 | _cBK | ||
| 942 | _cBK | ||
| 999 |
_c181030 _d181030 |
||