| 000 | 00719nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 20160826100742.0 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0-12-233430-2 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a535.374 | ||
| 245 | _a Laser microfabrication : thin film processes and lithography | ||
| 250 | _a | ||
| 260 |
_aSandiego, _bAcademic Press, _c1989 |
||
| 300 |
_axii,587 p., _b, _cBook |
||
| 500 | _aInternational School of Photonics | ||
| 653 | _aLasers- industrial applicationsLasers- industrial applicationsMicrolithography | ||
| 100 | _aEhrlich, Daniel, J. | ||
| 700 |
_aTsao, Jeffrey, Y. _a |
||
| 942 | _cBK | ||
| 942 | _cBK | ||
| 999 |
_c181033 _d181033 |
||