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| 005 | 20220517164002.0 | ||
| 008 | 050601s2005 ne a b 001 0 eng | ||
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_a537.5 _bSAN |
| 100 | 1 |
_aSantos, Héctor J. de los. _99668 |
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| 245 | 1 | 0 |
_aPrinciples and applications of NanoMEMS physics / _cby Héctor J. De Los Santos. |
| 300 |
_axv, 254 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aMicrosystems ; _v15 |
|
| 653 | _aPrinciples and applications - NanoMEMS physics / | ||
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/ecip0513/2005015829.html |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
| 942 | _cBK | ||
| 260 |
_aDordrecht, The Netherlands : _bSpringer, _cc2005. |
||
| 020 | _a1402032382 | ||
| 830 | 0 |
_aMicrosystems (Series) ; _vv. 15. _927 |
|
| 999 |
_c181496 _d181496 |
||