| 000 | 00544nam a22001817a 4500 | ||
|---|---|---|---|
| 005 | 20220518105314.0 | ||
| 008 | 100216t xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38152 _bMAY |
||
| 100 |
_aMay,Gary S. _97118 |
||
| 245 | _aFundamentals of Semiconductor Manufacturing and Process Control | ||
| 300 | _axvi,441p. | ||
| 653 | _aSemiconductor-Design and Construction | ||
| 653 | _aProcess Control-Statistical Method | ||
| 700 |
_aSpanos,Costas.J. _97122 |
||
| 942 | _cBK | ||
| 260 |
_aUK _bJohn Wiley&Sons _c2006 _97121 |
||
| 020 | _a0471784060 | ||
| 999 |
_c190118 _d190118 |
||